Silicon Run Etch [efilm]
2015
Streaming Video
This sixth video in the Silicon Run Series takes a close look at the etch process in semiconductor manufacturing, including chemical mechanical polish, or CMP. It shows how thin films of nonconductive, semiconductive, and conductive materials are sculpted into microchips. Following the fabrication process of a CMOS transistor, Silicon Run Etch looks specifically at dielectric etch, silicon etch, and metal etch. It also explores the role of pressure, gas flows, RF power, temperature, and machine geometry within the plasma etch processes. This video has a downloadable PDF attached with details on downloading an interactive quiz. The quiz includes footage from the video and is an excellent way for students or trainees to test themselves on how much they know about the processes of semiconductor manufacturing.
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Imprint:
[San Francisco, California, USA] : Kanopy Streaming, 2015.
Collation:
1 online resource (streaming video file)
Notes:
Title from title frames.In Process Record.Originally produced by Silicon Run Productions in 2000.In English
System details:
Mode of access: World Wide Web.
Language:
Undetermined
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Index terms:
Computer Science and ITEngineering
BRN:
498570
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